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KCI등재 학술저널

Compositional Study of Surface, Film, and Interface of Photoresist-Free Patternable SnO₂ Thin Film on Si Substrate Prepared by Photochemical Metal-Organic Deposition

Compositional Study of Surface, Film, and Interface of Photoresist-Free Patternable SnO₂ Thin Film on Si Substrate Prepared by Photochemical Metal-Organic Deposition

DOI : 10.6117/kmeps.2014.21.1.013

1. Introduction

2. Experimental Details

3. Results And Discussion

4. Conclusions

Acknowledgements

References

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