KCI등재
학술저널
Compositional Study of Surface, Film, and Interface of Photoresist-Free Patternable SnO₂ Thin Film on Si Substrate Prepared by Photochemical Metal-Organic Deposition
Compositional Study of Surface, Film, and Interface of Photoresist-Free Patternable SnO₂ Thin Film on Si Substrate Prepared by Photochemical Metal-Organic Deposition
- 한국마이크로전자및패키징학회
- 마이크로전자 및 패키징학회지
- 제21권 제1호
- : KCI등재후보
- 2015.03
- 13 - 17 (5 pages)
DOI : 10.6117/kmeps.2014.21.1.013