Compositional Study of Surface, Film, and Interface of Photoresist-Free Patternable SnO₂ Thin Film on Si Substrate Prepared by Photochemical Metal-Organic Deposition

한국마이크로전자및패키징학회 마이크로전자 및 패키징학회지 제21권 제1호 Compositional Study of Surface, Film, and Interface of Photoresist-Free Patternable SnO₂ Thin Film on Si Substrate Prepared by Photochemical Metal-Organic Deposition

학술저널

Compositional Study of Surface, Film, and Interface of Photoresist-Free Patternable SnO₂ Thin Film on Si Substrate Prepared by Photochemical Metal-Organic Deposition
Compositional Study of Surface, Film, and Interface of Photoresist-Free Patternable SnO₂ Thin Film on Si Substrate Prepared by Photochemical Metal-Organic Deposition

1. Introduction

2. Experimental Details

3. Results And Discussion

4. Conclusions

Acknowledgements

References