주사전자현미경(SEM)과 전자후방산란회절(EBSD)의 구조, 원리, 그리고 미세조직 분석 활용

Principles and Applications of SEM and EBSD for Microstructural Characterisation

This paper provides an overview of Scanning electron microscopy (SEM) and Electron backscatter diffraction (EBSD). SEM is an imaging technique that uses a focused electron beam to analyse the surface morphology, chemical composition, and crystallographic characteristics of materials in high resolution. EBSD analyses Kikuchi patterns and enables the extraction of detailed information such as crystallographic orientation, grain boundaries, texture, and local deformation. This work will deliver both theoretical principles and practical applications of SEM and EBSD technologies.