Hot Wall법에 의한 SrS/ZnS 다층박막 엘렉트로루미네센트 디바이스의 제작

Characterization of SrS/ZnS Multilayered thin film electroluminescent devices grown by hot wall technique

Thin films of ZnS and SrS were deposited by the hot wall evaporation technique. By supplying additional sulfur (S) vapor, the deposition rate of ZnS was increased, allowing ZnS films to be grown at substrate temperatures over 400℃. SrS thin films were grown through the chemical reaction of Sr and S vapor with the substrate temperature in the region of 350SrS/ZnS multilayered thin films were grown by the sequential deposition of the SrS and ZnS films. The (SrS/ZnS)n multilayered thin films showed x-ray diffraction lines from both ZnS and SrS layers, even when the thickness of each SrS and ZnS layer is 20 nm. The electoroluminescent devices with SrS:Ce/ZnS multilayered thin films showed a greenish blue EL emission.