상변화 구동 방식 마이크로 펌프의 제작 및 시험

The Fabrication and Test of a Phase-change Type Micropump

This paper presents the fabrication and test of a micropump consisting of a pair of Al flap valves and a phase-change type actuator. The actuator is composed of a heater, a silicone rubber diaphragm and a working fluid chamber. The diaphragm is actuated by the vaporization and the condensation of the working fluid. The micropump is fabricated by the anisotropic etching, the boron diffusion and the metal evaporation. The forward and the backward flow characteristics of the flap valves illustrate the appropriateness as a check valve. Also, the flow rate of the micropump is measured. When the square wave input voltage of 8 V, 70% duty ratio and 2 Hz is applied to the heater, the maximum flow rate of the micropump is $97\muell/min$ for zero pressure difference.