국가지식-학술정보
The Study on the Characteristic of Phase Transition in Differential Thickness of Se<sub>1</sub>Sb<sub>2</sub>Se<sub>2</sub> Thin Films
The Study on the Characteristic of Phase Transition in Differential Thickness of Se<sub>1</sub>Sb<sub>2</sub>Se<sub>2</sub> Thin Films
- 한국전기전자재료학회
- Transactions on Electrical and Electronic Materials
- Vol.5 No.6
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2004.01241 - 243 (3 pages)
- 0
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The phase transition between amorphous and crystalline states in chalcogenide semiconductor films can be controlled by electrical or pulsed laser beam; hence some chalcogenide semiconductor films can be applied to electrically write/erase nonvolatile memory devices, where the low conductive amorphous state and the high conductive crystalline state are assigned to binary states. In this letter, the characteristics of phase transition in differential chalcogenide thin film are investigated. Al was used for the electrode as the thickness of 100, 300, 500 nm, respectively.
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