Structural Properties of PZT(80/20) Thick Films Fabricated by Screen Printing Method
Structural Properties of PZT(80/20) Thick Films Fabricated by Screen Printing Method
- 한국전기전자재료학회
- Transactions on Electrical and Electronic Materials
- Vol.6 No.2
-
2005.0135 - 38 (4 pages)
- 0
Pb(Zr$_{0.8}$Ti$_{0.2}$)O$_{3}$ powders, prepared by the sol-gel method, were mixed with an organic vehicle and the PZT thick films were fabricated by the screen-printing techniques on Pt/Ah03 substrates. The structural properties were examined as a function of sintering temperature. The particle size distribution of the PZT powder derived from the sol-gel process is uniform with the mean particle size of about 2.6 m. As a result of the DTA, the formation of the polycrystalline perovskite phase was observed at around $890^{circ}$CC. In the X-ray diffraction analysis, all PZT thick films showed a perovskite polycrystalline structure without a pyrochlore phase. The perovskite crystallization temperature of PZT thick films was about $890^{circ}$C. The average thickness of the PZT thick films was approximately 80-90 m.
(0)
(0)