국가지식-학술정보
Comparison of Resonance Characteristics of ZnO-Based FBAR Devices for Various Thermal-Annealing Conditions
Comparison of Resonance Characteristics of ZnO-Based FBAR Devices for Various Thermal-Annealing Conditions
- 한국정보통신학회
- Journal of information and communication convergence engineering
- Vol.3 No.1
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2005.0123 - 27 (5 pages)
- 0
커버이미지 없음
In this paper, the effects of various annealing conditions on the resonance characteristics of ZnO-based FBAR devices are compared. Several FBAR device samples were fabricated by using three different annealing methods while one sample remained non-annealed as a reference for comparison. Return loss ($S_11$) could be significantly improved by both Bragg reflector-annealing and/or post-annealing. Especially, the use of the combined annealings resulted in most desirable resonance improvement compared with the Bragg reflector-annealing or post-annealing method alone.
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