ELID 연삭을 이용한 비축 비구면 렌즈의 초정밀 가공

Ultra-Precision Machining of Off-Axis Asymmetric Large-area Reflecting Mirror Using ELID Grinding Process

This study focused on the application of ELID mirror-surface grinding technology to the manufacture of off-axis asymmetric large-area reflecting mirrors made of BK7 glass. The size of the parts, such as asymmetric large-area mirrors or lens, made form-accuracy or roughness especially hard to measure after machining because of the measuring range limit of measurement devices. In this study, the ELID grinding system has been set up for mirror-surface machining experiments manufacturing off-axis asymmetric lenses. A measuring method using a reference workpiece has been suggested to measure the form-accuracy and roughness. According to the experimental results, even when using only a reference workpiece, it is confirmed that the surface roughness was 8 nmRa and form-accuracy was 80 nmRMS, with a best fit asymmetric radius when using a grinding wheel of #8,000. It is found that the accuracy of large-area parts could be estimated by the proposed process.