실시간 분광 엘립소미트리를 이용한 크롬 박막의 성장연구

Growth studies of chromium thin films using real-time spectroscopic ellipsometry

High speed real-time spectroscopic ellipsometry was employed in order to characterize the growth of chromium thin film. This instrument can collect 512 points of {<TEX>$Delta$</TEX>(hv), <TEX>$Psi$</TEX>(hv)} spectra from 1.3 to 4.5 eV with acquisition and repetition rates of 20 msec or less. When this instrument was integrated into the chromium thin film growth, we could obtain not only the information on film properties but also the details of the processes. We deduced the growth rates and the evolution of the optical properties of chromium thin films under several preparation conditions. We also demonstrated the contamination process of chromium thin films caused by air exposure.