미소변위 측정용 전기용량변환기 개발에 관한 연구

A Study on the Development of Capacitive Transducer for Measurement of Small Displacement

The capacitive transducers, which are used of the principle of capacitance changes by means of the variation of distance between electrodes, are usually utilized for measurement of small displacements. But the measurement ranges of this method are limited. In this study, the measurement ranges are extended by using the variation method of the surface area of electrodes. Thus the capacitive transducer and signal conditioner, which are having the capability of measurement range of 25mm and resolution of 0.1ulcorner, have developed, and its environmental characteristics are also tested.