다양한 재질에서의 flat-top 빔을 이용한 LIPSS 형성에 관한 연구

A study of fabrication of LIPSS using flat-top beam with various materials

In this study, laser-induced periodic surface structure (LIPSS) was fabricated on Ni, Si, and GaAs samples using a flat-top beam with a uniform energy distribution that was fabricated using a Gaussian femtosecond laser with a mechanical slit and tube lens. Unlike the Gaussian beam, the flat-top beam has a uniform beam profile, therefore the center and the periphery of the fabricated LIPSS have similar line periodicity. In addition, LIPSS was obtained not only in metals but also in metalloids and metals and metalloid compounds by using the narrow pulse width characteristic of a femtosecond laser.