Powder blasting을 이용한 Fused silica glass의 마이크로 채널 가공 및 특성 평가에 관한연구

Evaluation of micro-channel characteristics of fused silica glass using powder blasting

Recently, due to the development of MEMS technology, researches for the production of effective microstructures and shapes have been actively conducted. However, the process technology based on chemical etching has anumber of problems such as environmental pollution and time problems due to multi-process. Various processes to copewith this process are being studied, and one of the mechanical etching processes is the powder blasting process. Thisprocess is a method of spraying fine particles, which has the advantage of being an effective process in manufacturinghard brittle materials. However, it is also a process that adversely affects the material surface roughness and materialproperties due to the impact of the injection of fine particles. In this study, after fabricating micro-channels in fused silicaglass with excellent optical properties among the hard brittle materials, we used the nano indentation system to analyzethe micro parts using nano-particles as well as machinability and surface roughness analysis of the processed surface. Theanalysis was performed for the effective processing of powder blasting

Recently, due to the development of MEMS technology, researches for the production of effective microstructures and shapes have been actively conducted. However, the process technology based on chemical etching has anumber of problems such as environmental pollution and time problems due to multi-process. Various processes to copewith this process are being studied, and one of the mechanical etching processes is the powder blasting process. Thisprocess is a method of spraying fine particles, which has the advantage of being an effective process in manufacturinghard brittle materials. However, it is also a process that adversely affects the material surface roughness and materialproperties due to the impact of the injection of fine particles. In this study, after fabricating micro-channels in fused silicaglass with excellent optical properties among the hard brittle materials, we used the nano indentation system to analyzethe micro parts using nano-particles as well as machinability and surface roughness analysis of the processed surface. Theanalysis was performed for the effective processing of powder blasting