학술저널
Semi Process gas treatment using Thermal Plasma
Semi Process gas treatment using Thermal Plasma
- 한국환경에너지공학회
- 한국환경에너지공학회 학술대회지
- 2015년 추계학술발표회
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2015.1138 - 46 (9 pages)
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1. Semi Process gases？ PFCs
2. Type of Thermal Plasma generation
3. Development and Commercialize
4. Thermal Plasma Scrubber
5. Apparatus composition
6. Valuation(SMIC/SUNTECH/INOTERA)
7. Numerical calculation(Torch/Chamber)
8. Thermodynamic consideration
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