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Semi Process gas treatment using Thermal Plasma

Semi Process gas treatment using Thermal Plasma

1. Semi Process gases? PFCs

2. Type of Thermal Plasma generation

3. Development and Commercialize

4. Thermal Plasma Scrubber

5. Apparatus composition

6. Valuation(SMIC/SUNTECH/INOTERA)

7. Numerical calculation(Torch/Chamber)

8. Thermodynamic consideration

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